tailieunhanh - Dynamic response of the micro perforated crab beam used in mems vibratory gyroscope device

This paper presents a study on the dynamic response of the micro-beams with the crab shape and cut-out holes on the whole operating faces of the beam to create the micro-perforated beam by using FEM simulation software. The obtained results show that the size and shape form of the cut-out holes affect the mechanical responses of the beam on which the holes distribute. |