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Micro Electronic and Mechanical Systems

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The miniaturization and performance improvement in semiconductor devices and integrated circuits (ICs) are expected to continue through leveraging of nanotechnologies and nanomaterials. This evolution should accelerate the System-on-a-Chip (SoC) trend, i.e., singlechip integration of multifunctional, mixed-signal electronic components, toward realizing embedded nanoelectronic systems. In parallel with advances in electronics, we are witnessing the rise of micro-electro-mechanical systems (MEMS), with rapidly growing commercial opportunities and markets extending to a broader range of industrial sectors on a global scale | Micro Electronic AND Mechanical Systems I-Tech Micro Electronic AND Mechanical Systems Edited By Kenichi .