tailieunhanh - Micro Electronic and Mechanical Systems 2009 Part 3

Tham khảo tài liệu 'micro electronic and mechanical systems 2009 part 3', kỹ thuật - công nghệ, cơ khí - chế tạo máy phục vụ nhu cầu học tập, nghiên cứu và làm việc hiệu quả | 5 Nanomembrane A New MEMS NEMS Building Block Jovan Matovic1 and Zoran Jaksic2 1Vienna University of Technology 2Institute of Chemistry Technology and Metallurgy Belgrade Austria 2Serbia 1. Introduction Although MEMS devices are exceptionally diversified all of them are basically built from a very limited number of constituents manufactured in micrometer-size dimensions plates cantilevers bridges various channels. It is a combination of these basic building blocks that makes the almost limitless variety of MEMS devices. One may philosophize that at the very foundation of all technologies MEMS and nanotechnologies included one encounters atoms and molecules and the combinations of such basic structural elements can be almost arbitrarily combined to obtain any structure and functionality. In the reality however there is a relatively small set of structures behind the existing nanostructures and nanosystems which includes Quasi-zero-dimensional structures - nanoparticles including quantum dots fullere-nes buckyballs plasmonic nanoparticles etc. . This class may be extended to include nanoholes nanoapertures nanocavities etc. which can be seen as the complementary structures to nanoparticles having a cavity instead of nanoparticle material and a solid instead of the surrounding vacuum or fluid . Quasi-ID various nanorods nanowires nanotubes both carbon and inorganic ones -again including complementary structures. Quasi-2D ultrathin films and membranes. One may argue that this classification of nanostructural building blocks is actually similar to those already used . in the fields of semiconductor quantum structures where one deals with quantum dots zero-D quantum wires 1D or quantum wells 2D or in the fields of photonic crystals and metamaterials 1D 2D and 3D PBG structures etc. A plethora of other more complex nanostructures structures may be derived from those already listed and are actually built as their combinations. This includes . quantum rings various .

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