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Lecture ECE 6450 Microelectronic - Chapter 4: Oxidation (applies to Si and SiC only)
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Lecture ECE 6450 Microelectronic - Chapter 4: Oxidation (applies to Si and SiC only). After studying this section will help you understand the ability to grow a high quality thermal oxide has propelled Si into the forefront of all semiconductor technology. Some present day efforts are being made to produce SiGe channel transistors to marry the benefits of Si (good oxides) with the speed of Ge. |