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Simulation and optimization of a silicon - polymer bimorph microgripper

This paper presents an electrothermally bimorph microgripper based on silicon-polymer laterally stacked structures and then optimized method for decreasing the maximum working temperature, improving temperature profile. The actuated displacement is enhanced due to the polymer constraint effect. Both the thermal expansion and apparent Young’s modulus of the constrained polymer blocks are significantly improved, compared with the no constraint one. | Vietnam Journal of Mechanics, VAST, Vol. 34, No. 4 (2012), pp. 247 – 259 SIMULATION AND OPTIMIZATION OF A SILICON-POLYMER BIMORPH MICROGRIPPER Phan Huu Phu1 , Nguyen Ngoc Viet1 , Nguyen Minh Ngoc1 , Vu Ngoc Hung2 , Chu Duc Trinh1 1 University of Engineering and Technology, VNU, Vietnam 2 Hanoi University of Science and Technology, Vietnam Abstract. This paper presents an electrothermally bimorph microgripper based on silicon-polymer laterally stacked structures and then optimized method for decreasing the maximum working temperature, improving temperature profile. The actuated displacement is enhanced due to the polymer constraint effect. Both the thermal expansion and apparent Young’s modulus of the constrained polymer blocks are significantly improved, compared with the no constraint one. The device consists of a serpentine-shape deep silicon structure with a thin film aluminum heater on the top and filling polymer in the trenches among the vertical silicon parts. The fabricated bimorph microgripper can operate in four modes and generates a large motion up to 15 µm. The simulated results are met the fabricated measurements. The output displacement of the optimized structures are increased when the working temperature, power consumption decreases. The simulated results show that the output displacement is increased up to 500% at 2 V and temperature profile improved considerably. This electrothermally silicon-polymer opened and closed microgripper can be used in micro-robotics, micro-assembly, minimally invasive surgery, living cells surgery. Keyword: Bimorph actuator, microgripper, polymeric microactuator, silicon-polymer stack, 3D simulation, temperature profile optimization. 1. INTRODUCTION Microactuators for remote and precise manipulation of small objects are of great interest in a wide variety of applications. The design and development of such microgripper devices would be useful for robotics, microtechnology, precision engineering, defense, energy, and .