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MEMS Advanced Materials and Fabrication Methods - Nat. Aca. Press Part 5

Tham khảo tài liệu 'mems advanced materials and fabrication methods - nat. aca. press part 5', kỹ thuật - công nghệ, cơ khí - chế tạo máy phục vụ nhu cầu học tập, nghiên cứu và làm việc hiệu quả | Microelectromechanical Systems Advanced Materials and Fabrication Methods 1997 http www.nap.edu openbook 0309059801 html 15.html copyright 1997 2000 The National Academy of Sciences all rights reserved INTEGRATED CIRCUIT-RASED FABRICATION TECHNOLOGIES AND MATERIALS 15 After more than 40 years of development a large complement of IC engineers have been trained. These engineers provide a very important resource that directly contributes to the continued development of ICs. By taking advantage of the freedoms provided by the IC design procedures engineers have come up with new designs and ideas that have extended the IC process far beyond what was first envisioned. Clearly the characteristics of the IC process just described should be applied to the production of MEMS as much as possible. Focusing on ways to leverage the multibillion-dollar investment in the IC infrastructure will be effort well spent. Many of the processes that have been refined in IC technology to produce electronic devices can be adapted to make the mechanical structures needed in MEMS. These processes include those that support photolithography plasma etching wet etching diffusion implantation chemical-vapor deposition sputtering and vacuum deposition. The most sophisticated IC production uses very high performance equipment to control submicron line widths for example . Such fine dimensional control is not required in typical MEMS applications which therefore might be able to use earlier generation equipment. Thus in some cases MEMS fabrication facilities can make use of older IC processing lines thereby reducing startup costs for new industrial ventures or making it feasible to open MEMS-capable fabrication facilities in government laboratories or universities. USING EXISTING INTEGRATED CIRCUIT-BASED PROCESSES This section enumerates several IC-based fabrication processes that have been used to produce MEMS. Opportunities and technical challenges for each fabrication process are highlighted and