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Introduction To Microelectromechanical System P1

The ambulance sped down the Denver highway carrying Mr. Rosnes Avon to the hospital. The flashing lights illuminated the darkness of the night, and the siren alerted those drivers who braved the icy cold weather. Mrs. Avon's voice was clearly shaking as she placed the emergency telephone call a few minutes earlier. Her husband was complaining of severe heart palpitations and shortness of breath. She sat next to him in the rear of the ambulance and held his hand in silence, but her eyes could not hide her concern and fear | SERIES Here s a nontechnical introduction to the exciting field of microelectromechanical systems MEMS that describes in detail the materials used in producing MEMS including silicon polymers and glass and quartz substrates as well as MEMS design and fabrication for nozzles pressure and inertial sensors valves displays and other applications. An Introduction to Microelectromechanical Systems Engineering Inside you get an examination of the manufacture of commercial MEMS using surface and bulk micromachining techniques such as oxidation lithography chemical vapor deposition silicon fusion bonding and anisotropic wet and dry etching. Plus you get a full review of MEMS applications in a wide range of industries including data storage telecommunications consumer automotive medical and defense. C 2 A unique element of this book is its look at the future of MEMS its potential for microelectrode arrays actuators optical and RF switches high-resolution microdisplays microsystems and other technologies. You get all the information you need to understand and exploit the powerful commercial potential of MEMS. Nadim Maluf is head of research and development at NovaSensor in Fremont California and is Consulting Professor of Electrical Engineering at Stanford University. He received his B.E. in electrical engineering from the American University of Beirut his M.S. from the California Institute of Technology and his Ph.D. from Stanford University. Dr. Maluf has extensive industry experience in integrated circuit technology and MEMS and has published numerous articles. NADIM MALUF ISBN 0-89006-581-0 ọvêoãọô õósèis1 Ejd Artech House Publishers boston . London en i An Introduction to Microelectromechanical Systems Engineering For a listing of recent titles in the Artech House Microelectromechanical Systems Library turn to the back of this book. An Introduction to Microelectromechanical Systems Engineering Nadim Maluf Artech House Boston .