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Impact of geometry dimension on quality factor and masssensitivity of PZT thin film-based microcantilevers

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The cantilever quality factor has values in the range of 190 to 505, depending on the length and resonant mode. The mass-sensitivity increases when the cantilever length decreases and reaches the highest value of 37.6 Hz/pg for the 100-µm-long cantilever. Highmode vibration was successfully exhibited for the higher mass-detection sensitivity. |

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