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Bhushan, B. “Microscratching/Microwear, Nanofabrication/Nanomachining.” Handbook of Micro/Nanotribology. Ed. Bharat Bhushan Boca Raton: CRC Press LLC, 1999 © 1999 by CRC Press LLC Microscratching/ Microwear, Nanofabrication/ Nanomachining, and Nano/Picoindentation Using Atomic Force Microscopy Bharat Bhushan Introduction Experimental Techniques AFM for Microscratching/Microwear and Nanoindentation • Nano/Picoindenter 7 Microscratching/Microwear Studies Nanofabrication/Nanomachining Studies Nano/Picoindentation Closure References Introduction Wear of sliding surfaces can occur by one or more wear mechanisms, including adhesive, abrasive, fatigue, impact, corrosive, and fretting. The wear rate, a measure of wear, generally needs to be minimized (Bhushan, 1996). As the dimensions of components and loads used continue to decrease (such as in microelectromechanical. | Bhushan B. Microscratching icrowear Nanofabrication Nanomachining. Handbook of Micro Nanotribology. Ed. Bharat Bhushan Boca Raton CRC Press LLC 1999 1999 by CRC Press LLC 7 Microscratching Microwear Nanofabrication Nanomachining and Nano Picoindentation Using Atomic Force Microscopy Bharat Bhushan Introduction Experimental Techniques AFM for Microscratching Microwear and Nanoindentation Nano Picoindenter Microscratching Microwear Studies Nanofabrication Nanomachining Studies Nano Picoindentation Closure References Introduction Wear of sliding surfaces can occur by one or more wear mechanisms including adhesive abrasive fatigue impact corrosive and fretting. The wear rate a measure of wear generally needs to be minimized Bhushan 1996 . As the dimensions of components and loads used continue to decrease such as in microelectromechanical systems or MEMS scratching wear and mechanical properties at the micro- to nanoscales become very important. With the advent of the newly developed scanning probe microscopes SPMs particularly the atomic force microscope AFM it is possible to study the interfacial phenomena at a small scale and light load. The AFM FFM tip simulates a sharp single asperity traveling over a surface. Scratching and wear processes at different normal loads are studied in AFMs by using a sharp diamond tip. This tip can also be used for nanofabrication nanomachining. AFMs in conjunction with special sensors are used for measurement of mechanical properties on nano- to picoscales. 1999 by CRC Press LLC This chapter presents an overview of microscratching microwear nanofabrication nanomachining and nano picoindentation using AFM and related instrumentation. Experimental Techniques AFM for Microscratching Microwear and Nanoindentation Commercial AFMs are commonly used to conduct microscratching microwear and nanoindentation. Special sensors may be used in conjunction with AFMs for nano picoindentation studies. For .