tailieunhanh - Báo cáo hóa học: " Atomic characterization of Si nanoclusters embedded in SiO2 by atom probe tomography"

Tuyển tập báo cáo các nghiên cứu khoa học quốc tế ngành hóa học dành cho các bạn yêu hóa học tham khảo đề tài: Atomic characterization of Si nanoclusters embedded in SiO2 by atom probe tomography | Roussel et al. Nanoscale Research Letters 2011 6 164 http content 6 1 164 o Nanoscale Research Letters a SpringerOpen Journal NANO EXPRESS Open Access Atomic characterization of Si nanoclusters embedded in SiO2 by atom probe tomography Manuel Roussel 1 Etienne Talbot1 Fabrice Gourbilleau2 Philippe Pareige1 Abstract Silicon nanoclusters are of prime interest for new generation of optoelectronic and microelectronics components. Physical properties light emission carrier storage. of systems using such nanoclusters are strongly dependent on nanostructural characteristics. These characteristics size composition distribution and interface nature are until now obtained using conventional high-resolution analytic methods such as high-resolution transmission electron microscopy EFTEM or EELS. In this article a complementary technique the atom probe tomography was used for studying a multilayer ML system containing silicon clusters. Such a technique and its analysis give information on the structure at the atomic level and allow obtaining complementary information with respect to other techniques. A description of the different steps for such analysis sample preparation atom probe analysis and data treatment are detailed. An atomic scale description of the Si nanoclusters SiO2 ML will be fully described. This system is composed of SiO layers and 4-nm-thick SiO2 layers annealed 1 h at 900 C. Introduction Since the discovery of photoluminescence of porous silicon by Canham in 1990 1 nanostructured silicon systems have been extensively studied. Indeed it exhibits properties light emission carrier storage quantum confinement. which lead to plenty of potential applications photovoltaic cells light amplifiers nanoscale memory devices. compatible with silicon integration technology 2-5 . Silicon nanoclusters Si-nc embedded in silica matrix is commonly considered as one of the most promising of these systems 6-9 . Si-ncs are usually produced by

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