tailieunhanh - MICROELECTROMECHANICAL SYSTEMS AND DEVICES

The advances of microelectromechanical systems (MEMS) and devices have been instrumental in the demonstration of new devices and applications, and even in the creation of new fields of research and development: bioMEMS, actuators, microfluidic devices, RF and optical MEMS. Experience indicates a need for MEMS book covering these materials as well as the most important process steps in bulk micro-machining and modeling. We are very pleased to present this book that contains 18 chapters, written by the experts in the field of MEMS. . | MICROELECTROMECHANICAL SYSTEMS AND DEVICES Edited by Nazmul Islam Microelectromechanical Systems and Devices Edited by Nazmul Islam Published by InTech Janeza Trdine 9 51000 Rijeka Croatia Copyright 2012 InTech All chapters are Open Access distributed under the Creative Commons Attribution license which allows users to download copy and build upon published articles even for commercial purposes as long as the author and publisher are properly credited which ensures maximum dissemination and a wider impact of our publications. After this work has been published by InTech authors have the right to republish it in whole or part in any publication of which they are the author and to make other personal use of the work. Any republication referencing or personal use of the work must explicitly identify the original source. As for readers this license allows users to download copy and build upon published chapters even for commercial purposes as long as the author and publisher are properly credited which ensures maximum dissemination and a wider impact of our publications. Notice Statements and opinions expressed in the chapters are these of the individual contributors and not necessarily those of the editors or publisher. No responsibility is accepted for the accuracy of information contained in the published chapters. The publisher assumes no responsibility for any damage or injury to persons or property arising out of the use of any materials instructions methods or ideas contained in the book. Publishing Process Manager Vedran Greblo Technical Editor Teodora Smiljanic Cover Designer InTech Design Team First published March 2012 Printed in Croatia A free online edition of this book is available at Additional hard copies can be obtained from orders@ Microelectromechanical Systems and Devices Edited by Nazmul Islam p. cm. ISBN 978-953-51-0306-6 INTECH open science I open minds free online editions of InTech Books and .

• Cơ khí - Chế tạo máy
• Epiretinal Prostheses
• Cell Lysis
• DNA Extraction
• Measuring Methods
• MEMS Devices
• Coplanar Waveguide
• báo cáo khoa học
• báo cáo hóa học
• công trình nghiên cứu về hóa học
• tài liệu về hóa học
• cách trình bày báo cáo
• Journal of Science and Technology
• Novel compact dual broadband planar metamaterial antenna
• Composite Right Left Hande
• Coplanar waveguide feeding
• Create two frequency bands
• Multiple input multiple output
• Metamaterial antenna
• Low mutual coupling
• Defected ground structure