tailieunhanh - Nanotechnology and Nanoelectronics Materials, Devices, Measurement Techniques

The aim of this work is to provide an introduction into nanotechnology for the scientifically interested. However, such an enterprise requires a balance between comprehensibility and scientific accuracy. In case of doubt, preference is given to the latter. Much more than in microtechnology – whose fundamentals we assume to be known – a certain range of engineering and natural sciences are interwoven in nanotechnology. | W. R. Fahrner Editor Nanotechnology and Nanoelectronics Materials Devices Measurement Techniques w. R. Fahrner Editor Nanotechnology and Nanoelectronics Materials Devices Measurement Techniques With 218 Figures Springer Prof. Dr. W. R. Fahrner University of Hagen Chair of Electronic Devices 58084 Hagen Germany Library of Congress Control Number 2004109048 ISBN 3-540-22452-1 Springer Berlin Heidelberg New York This work is subject to copyright. All rights are reserved whether the whole or part of the material is concerned specifically the rights of translation reprinting reuse of illustrations recitation broadcasting reproduction on microfilm or in other ways and storage in data banks. Duplication of this publication or parts thereof is permitted only under the provisions of the German Copyright Law of September 9 1965 in its current version and permission for use must always be obtained from Springer. Violations are liable to prosecution act under German Copyright Law. Springer is a part of Springer Science Business Media GmbH Springer-Verlag Berlin Heidelberg 2005 Printed in Germany The use of general descriptive names registered names trademarks etc. in this publication does not imply even in the absence of a specific statement that such names are exempt from the relevant protective laws and regulations and therefore free for general use. Typesetting Digital data supplied by editor Cover-Design medionet AG Berlin Printed on acid-free paper 62 3020 Rw 5 4 3 2 .