tailieunhanh - SILICON CARBIDE MATERIALS, PROCESSING AND APPLICATIONS IN ELECTRONIC DEVICES_1

Silicon Carbide (SiC) and its polytypes have been a part of human civilization for a long time; the technical interest of this hard and stable compound has been realized in 1885 and 1892 by Cowless and Acheson for grinding and cutting purpose, leading to its manufacture on a large scale. The fundamental physical limitations of Si operation at higher temperature and power are the strongest motivations for switching to wide bandgap (WBG) semiconductors such as SiC for these applications. | SILICON CARBIDE -MATERIALS PROCESSING AND APPLICATIONS IN ELECTRONIC DEVICES Edited by Moumita Mukherjee Silicon Carbide - Materials Processing and Applications in Electronic Devices Edited by Moumita Mukherjee Published by InTech Janeza Trdine 9 51000 Rijeka Croatia Copyright 2011 InTech All chapters are Open Access articles distributed under the Creative Commons Non Commercial Share Alike Attribution license which permits to copy distribute transmit and adapt the work in any medium so long as the original work is properly cited. After this work has been published by InTech authors have the right to republish it in whole or part in any publication of which they are the author and to make other personal use of the work. Any republication referencing or personal use of the work must explicitly identify the original source. Statements and opinions expressed in the chapters are these of the individual contributors and not necessarily those of the editors or publisher. No responsibility is accepted for the accuracy of information contained in the published articles. The publisher assumes no responsibility for any damage or injury to persons or property arising out of the use of any materials instructions methods or ideas contained in the book. Publishing Process Manager Dragana Manestar Technical Editor Teodora Smiljanic Cover Designer Jan Hyrat Image Copyright Only Fabrizio 2011. Used under license from First published September 2011 Printed in Croatia A free online edition of this book is available at Additional hard copies can be obtained from orders@ Silicon Carbide - Materials Processing and Applications in Electronic Devices Edited by Moumita Mukherjee p. cm. 978-953-307-968-4 ikrrr iJ OPEN ACCESS INI Cvn PUBLISHER INTECH open free online editions of InTech Books and Journals can be found at .