tailieunhanh - MICROSENSORS

Microsensors are appropriately categorized as “transducers”, which are defined as devices that convert energy from one form to another. In the case of microsensors, the device typically converts a measured mechanical signal into an electrical signal. The critical physical dimensions of microsensors devices can vary from well below one micron on the lower end of the dimensional spectrum, all the way to several millimeters. Sensors and microsensors are: force and pressure microsensors, position and speed microsensors, acceleration microsensors, chemical microsensors, biosensors and temperature sensors | MICROSENSORS Edited by Igor V. Minin and Oleg V. Minin Microsensors Edited by Igor V. Minin and Oleg V. Minin Published by InTech Janeza Trdine 9 51000 Rijeka Croatia Copyright 2011 InTech All chapters are Open Access articles distributed under the Creative Commons Non Commercial Share Alike Attribution license which permits to copy distribute transmit and adapt the work in any medium so long as the original work is properly cited. After this work has been published by InTech authors have the right to republish it in whole or part in any publication of which they are the author and to make other personal use of the work. Any republication referencing or personal use of the work must explicitly identify the original source. Statements and opinions expressed in the chapters are these of the individual contributors and not necessarily those of the editors or publisher. No responsibility is accepted for the accuracy of information contained in the published articles. The publisher assumes no responsibility for any damage or injury to persons or property arising out of the use of any materials instructions methods or ideas contained in the book. Publishing Process Manager Sandra Bakic Technical Editor Teodora Smiljanic Cover Designer Martina Sirotic Image Copyright JOANCHANG 2010. Used under license from First published May 2011 Printed in India A free online edition of this book is available at Additional hard copies can be obtained from orders@ Microsensors Edited by Igor V. Minin and Oleg V. Minin p. cm. ISBN 978-953-307-170-1 I krrrz u OPEN ACCESS INI Lin PUBLISHER INTECH open free online editions of InTech Books and Journals can be found at .