tailieunhanh - MICROMACHINING TECHNIQUES FOR FABRICATION OF MICRO AND NANO STRUCTURES

Making microsystems at a scale level of few microns is called micromachining. Micromachining is used to fabricate three-dimensional microstructures. It is the foundation of a technology called Micro-Electro-Mechanical-Systems (MEMS). MEMS usually consist of three major parts: sensors, actuators, and an associate electronic circuitry that acts as the brain and controller of the whole system. | MICROMACHINING TECHNIQUES FOR FABRICATION OF MICRO AND NANO STRUCTURES Edited by Mojtaba Kahrizi Micromachining Techniques for Fabrication of Micro and Nano Structures Edited by Mojtaba Kahrizi Published by InTech Janeza Trdine 9 51000 Rijeka Croatia Copyright 2011 InTech All chapters are Open Access distributed under the Creative Commons Attribution license which allows users to download copy and build upon published articles even for commercial purposes as long as the author and publisher are properly credited which ensures maximum dissemination and a wider impact of our publications. After this work has been published by InTech authors have the right to republish it in whole or part in any publication of which they are the author and to make other personal use of the work. Any republication referencing or personal use of the work must explicitly identify the original source. As for readers this license allows users to download copy and build upon published chapters even for commercial purposes as long as the author and publisher are properly credited which ensures maximum dissemination and a wider impact of our publications. Notice Statements and opinions expressed in the chapters are these of the individual contributors and not necessarily those of the editors or publisher. No responsibility is accepted for the accuracy of information contained in the published chapters. The publisher assumes no responsibility for any damage or injury to persons or property arising out of the use of any materials instructions methods or ideas contained in the book. Publishing Process Manager Oliver Kurelic Technical Editor Teodora Smiljanic Cover Designer InTech Design Team First published January 2012 Printed in Croatia A free online edition of this book is available at Additional hard copies can be obtained from orders@ Micromachining Techniques for Fabrication of Micro and Nano Structures Edited by Mojtaba Kahrizi p. cm. ISBN