tailieunhanh - FUNDAMENTALSOF VACUUMTECHNOLOGY

A great deal has transpired since the final reprint of the previous edition of Fundamentals of Vacuum Technology appeared in 1987. LEYBOLD has in the meantime introduced a number of new developments in the field. These include the dry-running ALL×ex chemicals pump, the COOLVAC-FIRST cryopump systems with quick regeneration feature, turbomolecular pumps with magnetic bearings, the A-Series vacuum gauges, the TRANSPECTOR and XPR mass spectrometer transmitters, leak detectors in the UL series, and the ECOTEC 500 leak detector for refrigerants and many other gases. Moreover, the present edition of the ÒFundamentalsÓ goes into much greater detail on some topics | FUNDAMENTALS OF VACUUM TECHNOLOGY Fundamentals of Vacuum Technology Fundamentals of Vacuum Technology revised and compiled by Dr. Walter Umrath with contributions from Dr. Hermann Adam t Alfred Bolz Hermann Boy Heinz Dohmen Karl Gogol Dr. Wolfgang Jorisch Walter Monning Dr. Hans-Jurgen Mundinger Hans-Dieter Otten Willi Scheer Helmut Seiger Dr. Wolfgang Schwarz Klaus Stepputat Dieter Urban Heinz-Josef Wirtzfeld Heinz-Joachim Zenker