tailieunhanh - SEMICONDUCTOR SAFETY HANDBOOK

It is hard to imagine that less than fifteen years ago building and fire codes specific to the construction of a wafer fabrication facility were just in the process of being developed. Detection and evaluation of leaking underground storage tanks and epidemiological health studies aimed at qualifying and quantifying our “cleanroom” image were in their infancy stages and Cal- OSHA had just completed the first in-depth study of the industry’s chemical processes and associated industrial hygiene exposures | SEMICONDUCTOR SAFETY HANDBOOK Safety and Health in the Semiconductor Industry Edited by Richard A. Bolmen Jr. Aon Risk Services San Francisco California np NOYES PUBLICATIONS Westwood New Jersey . Copyright 1998 by Noyes Publications No part of this book may be reproduced or utilized in any form or by any means electronic or mechanical including photocopying recording or by any information storage and retrieval system without permission in writing from the Publisher. Library of Congress Catalog Card Number 97-24032 ISBN 0-8155-1418-2 Printed in the United States Published in the United States of America by Noyes Publications 369 Fairview Avenue Westwood New Jersey 07675 10 9 8 7 6 5 4 3 2 1 Library of Congress Cataloging-in-Publication Data Semiconductor safety handbook safety and health in the semiconductor industry edited by Richard A. Bolmen Jr. p. cm. Includes bibliographical references and index. ISBN 0-8155-1418-2 1. Semiconductor industry--United States--Safety measures. 2. Integrated circuits--Design and construction--Safety measures. I. Bolmen Richard A. 1997 96213815--dc21 97-24032 CIP About the Editor Richard A. Bolmen Jr. is presently with Aon Risk Services. Prior to that he was Senior Vice President of Minet Risk Services Palo Alto California responsible for the development and delivery of Minet s Workers Compensation Disability Management and Hazards Management consulting services nationwide. He was also with American RiskConsultants and Marsh McLennan Protection Consultants. He has over a decade of experience developing and managing safety environmental workers compensation and risk management programs for semiconductor manufacturing companies. Mr. Bolmen has served as the Northern California Regional Director and was on the Board of Directors for the Semiconductor Safety Association. He also served as the Division Safety Director for Semiconductor Equipment and Materials International from 1986 to 1989. NOYES PUBLICATIONS .

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