tailieunhanh - Microengineering, MEMS, and Interfacing A Practical Guide

The fundamental aim of microengineering — to take a design from a computer aided design (CAD) software package and manifest it in a physical manner — may be achieved through one of a number of different fabrication or micromachining technologies. Many of these technologies employ a process known generally as photolithography , or a variation of this process, to transfer a two-dimensional pattern from a mask into the structural material. The mask is created from the data held by the CAD package, and the structure is built up by a series of steps that involve the deposition (addition of material to the structure) and etching (removing material from the. | Microengineering MEMS and Interfacing A Practical Guide Copyright 2006 Taylor Francis Group LLC MECHANICAL ENGINEERING A Series of Textbooks and Reference Books Founding Editor L. L. Faulkner Columbus Division Battelle Memorial Institute and Department of Mechanical Engineering The Ohio State University Columbus Ohio 1. Spring Designer s Handbook Harold Carlson 2. Computer-Aided Graphics and Design Daniel L. Ryan 3. Lubrication Fundamentals J. George Wills 4. Solar Engineering for Domestic Buildings William A. Himmelman 5. Applied Engineering Mechanics Statics and Dynamics G. Boothroyd and C. Poli 6. Centrifugal Pump Clinic Igor J. Karassik 7. Computer-Aided Kinetics for Machine Design Daniel L. Ryan 8. Plastics Products Design Handbook Part A Materials and Components Part B Processes and Design for Processes edited by Edward Miller 9. Turbomachinery Basic Theory and Applications Earl Logan Jr. 10. Vibrations of Shells and Plates Werner Soedel 11. Flat and Corrugated Diaphragm Design Handbook Mario Di Giovanni 12. Practical Stress Analysis in Engineering Design Alexander Blake 13. An Introduction to the Design and Behavior of Bolted Joints John H. Bickford 14. Optimal Engineering Design Principles and Applications James N. Siddall 15. Spring Manufacturing Handbook Harold Carlson 16. Industrial Noise Control Fundamentals and Applications edited by Lewis H. Bell 17. Gears and Their Vibration A Basic Approach to Understanding Gear Noise J. Derek Smith 18. Chains for Power Transmission and Material Handling Design and Applications Handbook American Chain Association 19. Corrosion and Corrosion Protection Handbook edited by Philip A. Schweitzer 20. Gear Drive Systems Design and Application Peter Lynwander 21. Controlling In-Plant Airborne Contaminants Systems Design and Calculations John D. Constance 22. CAD CAM Systems Planning and Implementation Charles S. Knox 23. Probabilistic Engineering Design Principles and Applications James N. Siddall Copyright 2006 Taylor .

• Tiếng Anh thương mại
• Micromachining
• Photolithography
• Silicon Micromachining
• Nonsilicon Processes
• Mask Design
• Microsystems
• Micro Total Analysis Systems
• Surface micromachining
• Bulk micromachining
• MEMS structures
• copper interconnects
• island coalescence
• thermostatic bimetals
• Differential search algorithm based parametric optimization
• Electrochemical micromachining processes
• Parametric settings of EMM processes
• Three EMM processes
• Micro electromechanical system
• Nanoelectromechanical system applications
• Fabrication Processes
• MEMS Technologies
• Crystal Substrate
• Chemical Vapor DepositionTechnology Characterization
• Electronic Materials
• MEMS Materials
• Microelectronic Technologies
• Microsensors
• SAW Devices
• Technology from Lilliput
• MEM Structures
• Systems in Photonic Applications
• DNA
• RF Applications
• Microfabrication
• X Ray Lithography
• Molding High Aspect
• Nanofabrication
• Ratio Microstructures
• Microinstrumentation
• Thermal MEMS
• Laser Technology
• Document Security
• Wafer Bonding Process
• Design of micro gripper driven
• Micro gripper driven
• Electrothermal V shaped actuator
• V shaped actuator
• Silicon on insulator
• Handbook of mechanical engineering
• mechanical engineering
• mechanical design
• mechanical materials
• alloy materials
• Energy Technology
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