tailieunhanh - Micro-Optomechatronics

Micro-optomechatronics is a technology that fuses optics, electronics, and mechanics by the MEMS technology. This technology is used primarily for information and telecommunications equipment. This book explains the basis and the application of micro-optomechatronics. In information operation, mechanical movements are not required. Use of movement in space, however, often simplifies systems structure and increases the signalto- noise ratio of transducers remarkably over a system constructed only with solid-state components. There are many examples of information instruments that use optics, such as optical memories, optical communication devices, and optical measurement instruments | Micro-Optomechatronics Hiroshi Hosaka Graduate School of Frontier Sciences The University of Tokyo Tokyo Japan . Yoshitada Kata9iri NTT Microsystem Integration Laboratories Nippon Telegraph and Telephone Corporation Atsugi Japan Terunao Hirota Graduate School of Frontier Sciences The University of Tokyo Tokyo Japan Kiyoshi Itao Graduate School of Management of Science Technology Tokyo University of Science Tokyo Japan MARCEL DEKKER Marcel Dekker New York Copyright 2005 Marcel Dekker Inc. Kyoritsu Advanced Optoelectronic Series is credited for providing an English translation from a portion of a Japanese publication issued by Kyoritsu Shuppan 1999 . Although great care has been taken to provide accurate and current information neither the author s nor the publisher nor anyone else associated with this publication shall be liable for any loss damage or liability directly or indirectly caused or alleged to be caused by this book. The material contained herein is not intended to provide specific advice or recommendations for any specific situation. Trademark notice Product or corporate names may be trademarks or registered trademarks and are used only for identification and explanation without intent to infringe. Library of Congress Cataloging-in-Publication Data A catalog record for this book is available from the Library of Congress. ISBN 0-8247-5983-4 This book is printed on acid-free paper. Headquarters Marcel Dekker 270 Madison Avenue New York NY 10016 . tel 212-696-9000 fax 212-685-4540 Distribution and Customer Service Marcel Dekker Cimarron Road Monticello New York 12701 . tel 800-228-1160 fax 845-796-1772 World Wide Web http The publisher offers discounts on this book when ordered in bulk quantities. For more information write to Special Sales Professional Marketing at the headquarters address above. Copyright 2005 by Marcel Dekker. All Rights Reserved. Neither this book nor any part may be reproduced or transmitted in any form or by .