tailieunhanh - Báo cáo "Investigation of zinc oxide thin film by spectroscopic ellipsometry "

ZnO films were deposited on glass substrates by magnetron RF-sputtering. An accurate determination of the optical constants of these films is extremely important prior to its application in optical devices and spectroscopic ellipsometry provides a reasonably accurate method for the determination of optical constants of thin films. | VNU Journal of Science Mathematics - Physics 24 2008 16-23 Investigation of zinc oxide thin film by spectroscopic ellipsometry Nguyen Nang Dinh1 Tran Quang Trung2 Le Khac Binh2 Nguyen Dang Khoa2 Vo Thi Mai Thuan2 1College of Technology VNU 144 Xuan Thuy Hanoi Vietnam 2University of Natural Sciences Vietnam National University Ho Chi Minh City 227 Nguyen Van Cu 5 District Ho Chi Minh City Vietnam Received 4 January 2008 received in revised form 26 March 2008 Abstract. ZnO films were deposited on glass substrates by magnetron RF-sputtering. An accurate determination of the optical constants of these films is extremely important prior to its application in optical devices and spectroscopic ellipsometry provides a reasonably accurate method for the determination of optical constants of thin films. In this study we present the results gained by analyzing spectroscopic ellipsometry of ZnO thin film combined with comparison of transmission spectroscopy measured on a UV-VIS-NIR spectrophotometer. Ellipsometry data have been fitted with a model including a glass substrate and a ZnO film plus a surface void layer on top. From this fitting the refraction index n extinction coefficient k and thickniess d of the sputtered ZnO films were determined. By using the gained n k and d values the transmission spectrum was theoretically calculated and compared with the experimentally obtained transmission one. As a result of the combined spectroscopic ellipsometry and transmission analysis there was the good correlation in comparison. Keywords Thin film ellipsometry transmission spectrum refraction index extinction coefficient. 1. Introduction Although ellipsometry theory was well-known for a long time ago until 70s of the XX century ellipsometry has not been commonly used because of its sophisticated mathematical technique. Since the computer science has strongly developed ellipsometer systems become popularly used in laboratories for characterisation of materials and for optic thin .

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