tailieunhanh - MEMS Mechanical Sensors - Stephen Beeby Part 9

Tham khảo tài liệu 'mems mechanical sensors - stephen beeby part 9', kỹ thuật - công nghệ, cơ khí - chế tạo máy phục vụ nhu cầu học tập, nghiên cứu và làm việc hiệu quả | 150 Pressure Sensors 99 Buff W. et al. Universal Pressure and Temperature SAW Sensor for Wireless Applications Proc. 1997 Ultrasonics Symp. Toronto Canada October 5-8 1997 Vol. 1 pp. 359-362. 100 Canali C. et al. Piezoresistivity Effects in MOS-FET Useful for Pressure Transducers J. Phys. D Appl. Phys. Vol. 12 1979 pp. 1973-1983. 101 Alcántara S. et al. MOS Transistor Pressure Sensor Proc. IEEE Int. Conf. on Devices Circuits Systems ICCDCS 98 Venezuela 1998 pp. 381-285. 102 Okojie R. S. and N. Carr An Inductively Coupled High Temperature Silicon Pressure Sensor Proc. 6th IOP Conf. on Sensors and Their Applications Manchester England September 12-15 1993 pp. 135-140. 103 Wang Y. and M. Esashi The Structures for Electrostatic Servo Capacitive Vacuum Sensors Sensors and Actuators Vol. A66 1998 pp. 213-217. 104 Gogoi B. P. and C. H. Mastrangelo A Low-Voltage Force Balanced Pressure Sensor with Hermetically Sealed Servomechanism Proc. 12th IEEE Intl. Workshop on MEMS Orlando FL January 17-21 1999 pp. 493-498. 105 Park . and Y. B. Gianchandani A Servo-Controlled Capacitive Pressure Sensor Using a Capped-Cylinder Structure Microfabricated by a Three-Mask Process J. MEMS Vol. 12 No. 2 April 2003 pp. 209-220. 106 Scheeper P. R. et al. A Review of Silicon Microphones Sensors and Actuators Vol. A44 1994 pp. 1-11. 107 Kressman R. K. Klaiber and G. Hess Silicon Condenser Microphones with Corrugated Silicon Oxide Nitride Electret Membranes Sensors and Actuators Vol. A100 2002 pp. 301-309. 108 Yoo K. et al. Fabrication of Biomimetic 3-D Structured Diaphragms Sensors and Actuators Vol. A97-98 2002 pp. 448-456. 109 Miao J. et al. Design Considerations in Micromachined Silicon Microphones Microelectronics Journal Vol. 33 2002 pp. 21-28. 110 Kronast W. et al. Single-Chip Condenser Microphone Using Porous Silicon as a Sacrificial Layer for the Air Gap Sensors and Actuators Vol. A87 No. 3 2001 pp. 188-93. 111 Hsu . C. H. Mastrangelo and K. D. Wise A High Sensitivity Polysilicon