tailieunhanh - Innovations in Robot Mobility and Control - Srikanta Patnaik et al (Eds) Part 16

Tham khảo tài liệu 'innovations in robot mobility and control - srikanta patnaik et al (eds) part 16', kỹ thuật - công nghệ, cơ khí - chế tạo máy phục vụ nhu cầu học tập, nghiên cứu và làm việc hiệu quả | 294 . Tan et al. where ỏ x1 ỏ x2 are the linear errors of x1 x2 axes respectively and ổ x1 x2 refers to the cross-coupled linear error arising after each individual axis error is calibrated. A two-phase calibration process may thus be used for such a dual-axis stage. During phase 1 the individual error along either axis ổ x1 ổ x2 is first calibrated. Then the axes are individually compensated. After compensation of the individual axis Phase 2 of calibration will seek to derive the cross-coupled linear error ổ x1 x2 and subsequently compensate for it. General XY stage A general XY stage with three independent planar systems is shown in Figure . The planar systems are associated respectively with the table 0 X Y the bridge O1 X1 Y1 and the carriage O2 X2 Y2 . For conceptual purposes the measurement systems for the bridge and carriage are shown in Figure as being attached to the bridge and X carriage respectively via small non-existent connecting rods. It will be assumed that initially all three origins coincide and the axes of all three systems are aligned. Thus when the bridge moves a nominal distance Y the actual position of the bridge origin O1 with respect to the table system is given by the vector y Ì 001 c 8X y Fig. . XY stage 8 Intelligent Precision Motion Control 295 At the same time the bridge coordinate system rotates with respect to the table system due to the angular error motion. This rotation can be ex- pressed by the matrix R1 - Sy 1 1J Similarly when the X carriage moves a nominal distance X it follows that i x Ổx x 1 y x -ox R _ x c A Ỹ Ơ1Ơ2 O2 P xp yp represent the offsets of the x A y p where x y are the nominal positions tool tip Abbe error ổu v is the translational error along the u-direction under motion in the v direction u refers to the rotation along the u axis and a represents the out-of-squareness error. Therefore a volumetric error model can be derived with respect to the table system 1 -1

TỪ KHÓA LIÊN QUAN
crossorigin="anonymous">
Đã phát hiện trình chặn quảng cáo AdBlock
Trang web này phụ thuộc vào doanh thu từ số lần hiển thị quảng cáo để tồn tại. Vui lòng tắt trình chặn quảng cáo của bạn hoặc tạm dừng tính năng chặn quảng cáo cho trang web này.