tailieunhanh - Thin Film Materials Stress, Defect Formation and Surface Evolution

Within a period of a few decades, the ¯eld of materials science and engineering has emerged as a focal point for developments in virtually all areas of engineering and applied science. The study of thin film materials has been one of the unifying themes in the development of the ¯eld during this period. As understood here, the area encompasses ¯lms bonded to relatively thick substrates, multilayer materials, patterned ¯lms on substrates and free-standing ¯lms. Signi¯cant advances in methods for synthesizing and processing these materials for ever more speci¯c purposes, as well as in instrumentation for characterizing materials at ever diminishing size scales, have been key to modern engineering progress | Thin Film Materials Stress Defect Formation and Surface Evolution L. B. Freund Division of Engineering Brown University S. Suresh Department of Materials Science and Engineering Massachusetts Institute of Technology iii January 12 2003