tailieunhanh - Báo cáo hóa học: " Low Temperature Growth of In2O3 and InN Nanocrystals on Si(111) via Chemical Vapour Deposition Based on the Sublimation of NH4Cl in In"

Tuyển tập báo cáo các nghiên cứu khoa học quốc tế ngành hóa học dành cho các bạn yêu hóa học tham khảo đề tài: Low Temperature Growth of In2O3 and InN Nanocrystals on Si(111) via Chemical Vapour Deposition Based on the Sublimation of NH4Cl in In | Nanoscale Res Lett 2009 4 491-497 DOI s11671-009-9266-1 NANO EXPRESS Low Temperature Growth of In2O3 and InN Nanocrystals on Si 111 via Chemical Vapour Deposition Based on the Sublimation of NH4Cl in In Matthew Zervos Demetra Tsokkou Maria Pervolaraki Andreas Othonos Received 30 November 2008 Accepted 27 January 2009 Published online 21 February 2009 to the authors 2009 Abstract Indium oxide In2O3 nanocrystals NCs have been obtained via atmospheric pressure chemical vapour deposition APCVD on Si 111 via the direct oxidation of In with Ar 10 O2 at 1000 C but also at temperatures as low as 500 C by the sublimation of ammonium chloride NH4Cl which is incorporated into the In under a gas flow of nitrogen N2 . Similarly InN NCs have also been obtained using sublimation of NH4Cl in a gas flow of NH3. During oxidation of In under a flow of O2 the transfer of In into the gas stream is inhibited by the formation of In2O3 around the In powder which breaks up only at high temperatures . T 900 C thereby releasing In into the gas stream which can then react with O2 leading to a high yield formation of isolated 500 nm In2O3 octahedrons but also chains of these nanostructures. No such NCs were obtained by direct oxidation for TG 900 C. The incorporation of NH4Cl in the In leads to the sublimation of NH4Cl into NH3 and HCl at around 338 C which in turn produces an efficient dispersion and transfer of the whole In into the gas stream of N2 where it reacts with HCl forming primarily InCl. The latter adsorbs onto the Si 111 where it reacts with H2O and O2 leading to the formation of In2O3 nanopyramids on Si 111 . The rest of the InCl is carried downstream where it solidifies at lower temperatures and rapidly breaks down into metallic In upon exposure to H2O in the air. Upon carrying out the reaction of M. Zervos El M. Pervolaraki Department of Mechanical and Manufacturing Engineering Materials Science Group Nanostructured Materials and Devices Laboratory University of .

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