tailieunhanh - Báo cáo hóa học: " New Colloidal Lithographic Nanopatterns Fabricated by Combining Pre-Heating and Reactive Ion Etching"

Tuyển tập báo cáo các nghiên cứu khoa học quốc tế ngành hóa học dành cho các bạn yêu hóa học tham khảo đề tài: New Colloidal Lithographic Nanopatterns Fabricated by Combining Pre-Heating and Reactive Ion Etching | Nanoscale Res Lett 2009 4 1324-1328 DOI s11671-009-9400-0 NANO EXPRESS New Colloidal Lithographic Nanopatterns Fabricated by Combining Pre-Heating and Reactive Ion Etching Chunxiao Cong William Chandra Junus Zexiang Shen Ting Yu Received 26 May 2009 Accepted 17 July 2009 Published online 28 July 2009 to the authors 2009 Abstract We report a low-cost and simple method for fabrication of nonspherical colloidal lithographic nanopatterns with a long-range order by preheating and oxygen reactive ion etching of monolayer and double-layer polystyrene spheres. This strategy allows excellent control of size and morphology of the colloidal particles and expands the applications of the colloidal patterns as templates for preparing ordered functional nanostructure arrays. For the first time various unique nanostructures with long-range order including network structures with tunable neck length and width hexagonal-shaped and rectangularshaped arrays as well as size tunable nanohole arrays were fabricated by this route. Promising potentials of such unique periodic nanostructures in various fields such as photonic crystals catalysts templates for deposition and masks for etching are naturally expected. Keywords Nanosphere lithography Nanopatterns Reactive ion etching Preheating Nonspherical Nonclose-packed Introduction Assembling colloidal micro nano particles into 2-dimensional 2D or 3-dimensional 3D ordered arrangements has been of considerable importance in potential applications to biochips and biosensors 1-3 chemical sensors optical and electronic devices 4 photonic crystals and C. Cong W. C. Junus Z. Shen T. Yu H Division of Physics and Applied Physics School of Physical and Mathematical Sciences Nanyang Technological University Singapore 637371 Singapore e-mail yuting@ suface wettability 5 6 and as templates for designed nanostructures for magnetic data storage memory bits and surface-enhanced Raman scattering substrates etc. 7 8 . A variety of .