tailieunhanh - báo cáo hóa học:" Transparent SiON/Ag/SiON multilayer passivation grown on a flexible polyethersulfone substrate using a continuous roll-to-roll sputtering system"

Transparent SiON/Ag/SiON multilayer passivation grown on a flexible polyethersulfone substrate using a continuous roll-to-roll sputtering system | Kim and Cho Nanoscale Research Letters 2012 7 69 http content 7 1 69 o Nanoscale Research Letters a SpringerOpen Journal NANO EXPRESS Open Access Transparent SiON Ag SiON multilayer passivation grown on a flexible polyethersulfone substrate using a continuous roll-to-roll sputtering system Han-Ki Kim and Chung-Ki Cho Abstract We have investigated the characteristics of a silicon oxynitride silver silicon oxynitride SiON Ag SiON multilayer passivation grown using a specially designed roll-to-roll R2R sputtering system on a flexible polyethersulfone substrate. Optical structural and surface properties of the R2R grown SiON Ag SiON multilayer were investigated as a function of the SiON thickness at a constant Ag thickness of 12 nm. The flexible SiON Ag SiON multilayer has a high optical transmittance of at optimized conditions due to the antireflection and surface plasmon effects in the oxide-metal-oxide structure. The water vapor transmission rate of the SiON Ag SiON multilayer is g m2 day at an optimized SiON thickness of 110 nm. This indicates that R2R grown SiON Ag SiON is a promising thin-film passivation for flexible organic light-emitting diodes and flexible organic photovoltaics due to its simple and low-temperature process. Introduction Rapid progress in organic-based flexible optoelectronics such as flexible organic light-emitting diodes OLEDs and organic photovoltaics OPVs required a high-performance thin-film passivation because both lifetime and performance of the flexible OLEDs and OPVs are critically affected by the quality of the encapsulation 1-3 . The long-term stability of flexible OLEDs and OPVs is still limited due to the instability of the luminescent organic materials and low work function metals interfacial reactions and chemical reactions of the organic layers with oxygen and moisture in air 4 . For those reasons several types of encapsulation techniques have been extensively explored to improve the longterm