tailieunhanh - Báo cáo hóa học: " Nanogrids and Beehive-Like Nanostructures Formed by Plasma Etching the Self-Organized SiGe Islands"

Tuyển tập báo cáo các nghiên cứu khoa học quốc tế ngành hóa học dành cho các bạn yêu hóa học tham khảo đề tài: Nanogrids and Beehive-Like Nanostructures Formed by Plasma Etching the Self-Organized SiGe Islands | Nanoscale Res Lett 2010 5 1456-1463 DOI s11671-010-9661-7 NANO EXPRESS Nanogrids and Beehive-Like Nanostructures Formed by Plasma Etching the Self-Organized SiGe Islands Yuan-Ming Chang Sheng-Rui Jian Jenh-Yih Juang Received 19 April 2010 Accepted 25 May 2010 Published online 8 June 2010 The Author s 2010. This article is published with open access at Abstract A lithography-free method for fabricating the nanogrids and quasi-beehive nanostructures on Si substrates is developed. It combines sequential treatments of thermal annealing with reactive ion etching RIE on SiGe thin films grown on 100 -Si substrates. The SiGe thin films deposited by ultrahigh vacuum chemical vapor deposition form self-assembled nanoislands via the strain-induced surface roughening Asaro-Tiller-Grinfeld instability during thermal annealing which in turn serve as patterned sacrifice regions for subsequent RIE process carried out for fabricating nanogrids and beehive-like nanostructures on Si substrates. The scanning electron microscopy and atomic force microscopy observations confirmed that the resultant pattern of the obtained structures can be manipulated by tuning the treatment conditions suggesting an interesting alternative route of producing self-organized nanostructures. Keywords SiGe High-resolution reciprocal space mapping SEM AFM TEM Introduction Periodical nanostructures are of great research interest because of their potential applications in data storage 1-3 . Chang . Jian Department of Materials Science and Engineering I-Shou University Kaohsiung 840 Taiwan e-mail srjian@ . Juang Department of Electrophysics National Chiao Tung University Hsinchu 300 Taiwan as well as in preparing photonic crystals 4 5 . In order to realize such opportunities the development of lithography techniques that are capable of fabricating large area periodical nanostructures with reasonable control over their size and periodicity is required. In general two