tailieunhanh - Microm echanical hotonics

Micromechanical photonics is evolvingin interdisciplinary research and engineering fields and merging independently developed technologies based on optics, mechanics, electronics, and physical/chemical sciences. Manufacturing technologies such as those of semiconductor lasers, surface micromachining and bulk micromachiningare promotingtec hnology fusion. | MICROTECHNOLOGY AND MEMS H. Ukita Micromechanical Photonics springer microtechnology and mems microtechnology and mems Series Editor H. Fujita D. Liepmann The series Microtechnology and MEMS comprises text books monographs and state-of-the-art reports in the very active field of microsystems and microtechnology. Written by leading physicists and engineers the books describe the basic science device design and applications. They will appeal to researchers engineers and advanced students. Mechanical Microsensors By M. Elwenspoek and R. Wiegerink CMOS Cantilever Sensor Systems Atomic Force Microscopy and Gas Sensing Applications By D. Lange O. Brand and H. Baltes Micromachines as Tools for Nanotechnology Editor H. Fujita Modelling of Microfabrication Systems By R. Nassar and W. Dai Laser Diode Microsystems By H. Zappe Silicon Microchannel Heat Sinks Theories and Phenomena By L. Zhang . Goodson and . Kenny Shape Memory Microactuators ByM. Kohl Force Sensors for Microelectronic Packaging By J. Schwizer M. Mayer and O. Brand Integrated Chemical Microsensor Systems in CMOS Technology By A. Hierlem CCD Image Sensors in Deep-Ultraviolet Degradation Behavior and Damage Mechanisms By F. M. Li and A. Nathan Micromechanical Photonics By H. .