tailieunhanh - Báo cáo hóa học: " Morphology Analysis of Si Island Arrays on Si(001)"

Tuyển tập báo cáo các nghiên cứu khoa học quốc tế ngành hóa học dành cho các bạn yêu hóa học tham khảo đề tài: Morphology Analysis of Si Island Arrays on Si(001) | Nanoscale Res Lett 2010 5 1882-1887 DOI s11671-010-9725-8 SPECIAL ISSUE ARTICLE Morphology Analysis of Si Island Arrays on Si 001 A. Gonzalez-Gonzalez M. Alonso E. Navarro J. L. Sacedon A. Ruiz Received 27 June 2010 Accepted 26 July 2010 Published online 11 August 2010 The Author s 2010. This article is published with open access at Abstract The formation of nanometer-scale islands is an important issue for bottom-up-based schemes in novel electronic optoelectronic and magnetoelectronic devices technology. In this work we present a detailed atomic force microscopy analysis of Si island arrays grown by molecular beam epitaxy. Recent reports have shown that self-assembled distributions of fourfold pyramid-like islands develop in 5-nm thick Si layers grown at substrate temperatures of 650 and 750 C on HF-prepared Si 001 substrates. Looking for wielding control and understanding the phenomena involved in this surface nanostructuring we develop and apply a formalism that allows for processing large area AFM topographic images in a shot obtaining surface orientation maps with specific information on facets population. The procedure reveals some noticeable features of these Si island arrays . a clear anisotropy of the in-plane local slope distributions. Total island volume analysis also indicates mass transport from the substrate surface to the 3D islands a process presumably related to the presence of trenches around some of the pyramids. Results are discussed within the framework of similar island arrays in homoepitaxial and heteroepitaxial semiconductor systems. Keywords Silicon nanostructures Molecular beam epitaxy Self-assembly Scanning probe microscopy Morphology analysis A. Gonzalez-Gonzalez M. Alonso E. Navarro J. L. Sacedon A. Ruiz Instituto de Ciencia de Materiales de Madrid ICMM-CSIC C Sor Juana Intis de la Cruz 3 Cantoblanco Madrid 28049 Spain e-mail agonzo@ Introduction The growth of self-assembled island arrays on .