tailieunhanh - Nano and Microelectromechanical Systems P1

The development and deployment of NEMS and MEMS are critical to the . economy and society because nano- and microtechnologies will lead to major breakthroughs in information technology and computers, medicine and health, manufacturing and transportation, power and energy systems, and avionics and national security. NEMS and MEMS have important impacts in medicine and bioengineering (DNA and genetic code analysis and synthesis, drug delivery, diagnostics, and imaging), bio and information technologies, avionics, and aerospace (nano- and microscale actuators and sensors, smart reconfigurable geometry wings and blades, space-based flexible structures, and microgyroscopes), automotive systems and transportation (sensors and actuators, accelerometers), manufacturing. | CHAPTER 1 NANO- AND MICROENGINEERING AND NANO- AND MICROTECHNOLOGIES . INTRODUCTION The development and deployment of NEMS and MEMS are critical to the . economy and society because nano- and microtechnologies will lead to major breakthroughs in information technology and computers medicine and health manufacturing and transportation power and energy systems and avionics and national security. NEMS and MEMS have important impacts in medicine and bioengineering DNA and genetic code analysis and synthesis drug delivery diagnostics and imaging bio and information technologies avionics and aerospace nano- and microscale actuators and sensors smart reconfigurable geometry wings and blades space-based flexible structures and microgyroscopes automotive systems and transportation sensors and actuators accelerometers manufacturing and fabrication public safety etc. During the last years the government and the high-technology industry have heavily funded basic and applied research in NEMS and MEMS due to the current and potential rapidly growing positive direct and indirect social and economic impacts. Nano- and microengineering are the fundamental theory engineering practice and leading-edge technologies in analysis design optimization and fabrication of NEMS and MEMS nano- and microscale structures devices and subsystems. The studied nano- and microscale structures and devices have dimensions of nano- and micrometers. To support the nano- and microtechnologies basic and applied research and development must be performed. Nanoengineering studies nano- and microscale-size materials and structures as well as devices and systems whose structures and components exhibit novel physical electromagnetic and electromechanical chemical and biological properties phenomena and processes. The dimensions of nanosystems and their components are 10-10 m molecule size to 10-7 m that is to 100 nanometers. Studying nanostructures one concentrates one s attention on the atomic and .

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