tailieunhanh - Sensitivity analysis of mems capacitive pressure sensor using carbon diaphragm
In this paper, we present simulation and evaluation of sensitivity of electrical and mechanical effects of MEMS based capacitive pressure sensor with rectangle diaphragm using COMSOL Multiphysics. This includes diaphragm deflection, sensitivity and linearity analysis, capacitance and thermal considerations. Capacitance values are plotted under uniform external pressure 10kPa. Selected materials include silicon and carbon, acknowledging that carbon has shown the best and steady result. Simulation results also show how the capacitance and diaphragm deformation varies under increasing pressure. |
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