tailieunhanh - Study on fluorination and hydrogenation in transparent conducting zinc oxide thin films

Fluorination and hydrogenation are known as two methods for enhancing crystalline structural and electrical properties of ZnO material. The ZnO thin films normally require a low resistivity and a high transmittance for using as high-performance transparent electrodes in optoelectronic applications. In this study, we report successful preparation of fluorinated and hydrogenated ZnO thin films (FZO and HFZO) by using . magnetron sputtering technique. The hydrogenation was carried out by depositing the films in hydrogen plasma atmosphere, while a highly-sintered body of ZnO and ZnF2 compound was employed as a sputtering target for the fluorination. | Study on fluorination and hydrogenation in transparent conducting zinc oxide thin films