tailieunhanh - Investigation of coupled effects of temperature and relative humidity on dynamic performance of mems beam resonators in gas rarefaction

The modified molecular gas lubrication (MMGL) equation with the effective viscosity of moist air is utilized to solve for the squeeze film damping (SFD) problem on the dynamic performance of MEMS resonators. | Investigation of coupled effects of temperature and relative humidity on dynamic performance of mems beam resonators in gas rarefaction