tailieunhanh - Deposition of high-electron-mobility transparent conducting aluminum-doped zinc oxide thin films by dc magnetron sputtering

Transparent conducting Al-doped ZnO (AZO) thin films were deposited on glass substrates by DC magnetron sputtering from AZO ceramic target ( %wt Al2O3) in gas mixture of (Ar + H2) at different substrate temperatures. | Journal of Science and Technology 54 (1A) (2016) 160-167 DEPOSITION OF HIGH-ELECTRON-MOBILITY TRANSPARENT CONDUCTING ALUMINUM-DOPED ZINC OXIDE THIN FILMS BY DC MAGNETRON SPUTTERING Hoang Van Dung*, Nguyen Duy Khanh, Tran Cao Vinh Laboratory of Advanced Materials – VNUHCM-University of Science, 227 Nguyen Van Cu, Ho Chi Minh City, Viet Nam. * Email: hvdung@ Received: 6 September 2015; Accepted for publication: 26 October 2015 ABSTRACT Transparent conducting Al-doped ZnO (AZO) thin films were deposited on glass substrates by DC magnetron sputtering from AZO ceramic target ( %wt Al 2O3) in gas mixture of (Ar + H2) at different substrate temperatures. At value of % of ratio of H2 to (H2+Ar) and at substrate temperature of 200 oC, electron mobility in obtained AZO films is , which is much larger than of films fabricated in the same condition without H2. AZO films also have a low resistivity of ×10-4 , low sheet resistance of Ω/□ and high average transmittance above 80 % in the wavelength range of 400 – 1100 nm. Keywords: transparent conducting; AZO thin films; DC magnetron sputtering; high electron mobility. 1. INTRODUCTION Transparent conducting oxide (TCO) thin films are widely used for opto-electronic device applications, such as solar cells, light emitting diodes, flat panel displays, and low emissivity windows [1 – 3]. At present, Indium tin oxide (ITO) thin films are popularly used as TCOs in opto-electronic devices. However, a shortage of indium may occur in the near future because of the limited nature of world indium reserves. Therefore, it is important to find other materials to replace indium. ZnO is one of the best choices because of its n-type wide bandgap andof its abundance in nature about ~1019 metric tons [4] led to the low prices. Undoped ZnO thin films have high transmittance in visible and near infrared wavelength regions, but the electrical resistivity is relatively high. For the .

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