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Non-Destructive Resonant Frequency Measurement on MEMS Actuators

Resonant frequency measurements provide useful insight into the repeatability of MicroElectroMechanical Systems (MEMS) manufacturing processes. Several techniques are available for making this measurement. | Non-Destructive Resonant Frequency Measurement on MEMS Actuators Norman F. Smith1 Danelle M. Tanner1 Scot E. Swanson1 and Samuel L. Miller2 Sandia National Laboratories P.O. Box 5800 MS 1081 Albuquerque NM 87185-1081 email smithnf@sandia.gov http www.micromachine.org 2MEMX Inc. 5600 Wyoming Blvd. NE Suite 20 Albuquerque NM 87109 Abstract Resonant frequency measurements provide useful insight into the repeatability of MicroElectroMechanical Systems MEMS manufacturing processes. Several techniques are available for making this measurement. All of these techniques however tend to be destructive to devices which experience sliding friction since they require the device to be operated at resonance. A non-destructive technique will be presented which does not require the device to be continually driven at resonance. This technique was demonstrated on a variety of MEMS actuators. Introduction Parametric measurements are at the heart of microelectronics manufacturing. These measurements allow the manufacturing processes to be continually monitored and corrections to be made when necessary. Without these crucial measurements the mass production of microelectronics would soon be impossible. The growing MEMS industry is in need of similar parametric measurements that can provide the insight required to control these processes. This will provide the yields necessary for inexpensive mass production of microsystems devices. Some of the required parametric measurements for MEMS such as sheet resistance contact resistance and electrical line width are directly transferable from the microelectronics industry. MEMS devices also require measurements that have no microelectronics counterpart. Resonant frequency measurements are one of those with no microelectronics counterpart. Several techniques are available to measure resonant frequency. These techniques range from manual and computer-controlled blurenvelope techniques 1 to sophisticated electronic measurements 2 . All of these .