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Addressing the needs of complex mems design

Microelectromechanical systems are moving from the simple single-function devices of the past to more elaborate systems with complex structural intricacies with rich dynamic subtleties. However, despite the relatively large number of CAD for MEMS tools, products, and vendors, MEMS design today still largely consists of working at the whiteboard with colleagues and entering simplified equations into Mathcad, if not writing them by hand on the back of an envelope. Today’s CAD tools are useful for design verification, but are not often used in the early phases of design. Additionally they are generally useful for in-depth simulation of an individual device fabricated in a new process, rather than a collection of devices forming. | ADDRESSING THE NEEDS OF COMPLEX MEMS DESIGN J.V. Clark1 D. Bindel2 W. Kao2 E. Zhu2 A. Kuo6 N. Zhou4 J. Nie2 J. Demmel2 Z. Bai5 S. Govindjee K.S.J. Pister2 M. Gu2 A. Agogino4 1Applied Science Technology 2Electrical Engineering Computer Science 3Civil Engineering 4Mechanical Engineering 1-4University of California at Berkeley USA 5Computer Science University of California at Davis USA 6Electrical Engineering University of Michigan USA ABSTRACT In this paper we report several advances in the Sugar2.0 MEMS system simulation package including reduced-order modeling techniques simple hierarchical description of complex structures synthesis tools a variety of models and a web-based interface. Examples include the modeling of a torsional micromirror with lateral actuators compared to experiment and the prototyping of a microrobot. 1 INTRODUCTION Microelectromechanical systems are moving from the simple single-function devices of the past to more elaborate systems with complex structural intricacies with rich dynamic subtleties. However despite the relatively large number of CAD for MEMS tools products and vendors MEMS design today still largely consists of working at the whiteboard with colleagues and entering simplified equations into Mathcad if not writing them by hand on the back of an envelope. Today s CAD tools are useful for design verification but are not often used in the early phases of design. Additionally they are generally useful for in-depth simulation of an individual device fabricated in a new process rather than a collection of devices forming an entire microsystem. Sugar 1 was created to investigate remedies to the above problems. Its framework exploits the familiar open-code Matlab environment which invites features and modifications from users. We have previously shown that the number of equations that describe many MEMS designs can be greatly reduced using modified nodal analysis while still maintaining accuracy within fabrication limits 2-4 . Test .