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The deposition of Zn doped SnO2 thin films by a compression sprayer for alcohol vapor sensor

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The thin films of SnO2 and Zn-doped SnO2 were deposited on glass wafer substrate by a compression sprayer system using SnCl2.2H2O and Zn(CH3COO)2.2H2O as precursors. The influence of the deposition temperature and Zn-doped contents on SnO2 and Zn-doped SnO2 crystal phase were investigated by XRD, respectively. |

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